Image of the Week - September 7, 2004

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Micrograsses on Silicon Substrate

The micrograsses in this ESEM image are over 200 micrometers long and 10 micrometers in diameter; the aspect ratio is about 20. The structures were formed using the DRIE process with a formula developed in our laboratory. The micrograss structure is to be used as a pre-concentrator in our MEMS gas sensor project.

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Contact: jungyeom@uiuc.edu, yjtang@uiuc.edu

Uploaded Tue Sep 7 09:45:58 2004 by Scott Jay Robinson

Updated Tue Feb 2 10:14:53 2010 by Daniel E. Weber