Image of the Week - April 10, 2007

View full-sized.

Photonic Crystal by Phase Mask Lithography

SEM image of a photonic crystal structure fabricated using phase mask lithography. The XY grating periodicity of the phase mask (and the resulting pattern) is 1.57 microns. The grating was fabricated by backside exposure, through the substrate, near the edge of the sample, so some of the diffracted orders are missing from the interference pattern, giving an asymmetric unit cell.

Image Courtesy:

Contact: mcgeorg1@uiuc.edu

Uploaded Wed Apr 11 11:20:32 2007 by Scott Jay Robinson

Updated Wed Feb 3 10:33:24 2010 by Daniel E. Weber