Environmental Scanning Electron Microscope (ESEM)

Field-Emission Environmental Scanning Electron Microscope (ESEM-FEG) with Energy-Dispersive Spectroscopy (EDS)

A versatile microscope with 2 nm ultimate resolution. Works well in both Hi-Vac mode (normal SEM) and Wet mode (as an ESEM). In Wet mode, the Peltier stage may be utilized to keep samples at 100% R.H. while they are being imaged.

For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Sample Images Acquired from the ESEM.
Primary ContactsCate Wallace for training inquiries
Scott Robinson
Manufacturer FEI Company
Equipment ModelPhilips XL30 ESEM-FEG
Features - Everhart-Thornley secondary electron detector
- Robinson series 6 scintillator-type backscattered electron detector (BSD), plus solid-state low- and standard voltage BSDs
- Several different gaseous secondary electron detectors (GSEDs), from the LF (large-field) detector to the 0.5-mm-aperture detector
- EDAX light-element energy-dispersive spectroscopy (EDS)
- Peltier-effect heating/cooling stage (20° C above/below ambient).
- 1000° C and 1500° C hotstages.
Location B606L
Phone(217) 265-8164
Related Equipment - carbon evaporator
- sputter coater
- critical point dryer
- osmium plasma coater
User ResourcesHow ESEM Works
General Information and Operating Procedures
SEM Fixation Protocol
Recording SEM Video [DRAFT]
SponsorsNational Science Foundation DBI-9871103