Inspection Light Microscope


The Zeiss AxioScope A1 is configured to perform reflected light microscopy as well as reflected light differential-interference contrast (DIC) and reflected light dark field microscopy. Images may be acquired using a Zeiss AxioCam MRc color CCD camera. The microscope is used for individual process step inspection of MEMs devices such as microstamps or microfluidic devices, alignment of either multi layer photoresist or multiple polymer layer bonding, also final inspection and evaluation of devices.The Linkam heating/freezing microscope stage THMS600 that comes with the Raman confocal microscope can also be used on this microscope.

Tables for the Zeiss Objectives can be found here.
A chart for immersion oil types can be found here.

For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary ContactsDianwen Zhang
ManufacturerCarl Zeiss, Inc.
Equipment ModelAxioScope A1
Features- High resolution color CCD
- Reflected Bright Field
- Reflected Dark Field
- Reflected Polarized Light
- Transmitted Bright Field
- Zeiss Axiovision LE Software
LocationB606I
Phone(217) 244-4473
User ResourcesAxioVision LE Rel. 4.7 viewer software