Micrograsses on Silicon Substrate
The micrograsses in this ESEM image are over 200 micrometers long and 10 micrometers in diameter; the aspect ratio is about 20. The structures were formed using the DRIE process with a formula developed in our laboratory. The micrograss structure is to be used as a pre-concentrator in our MEMS gas sensor project.
- Yanjun (David) Tang , Department of Chemical and Biomolecular Engineering
- Junghoon Yeom , Department of Chemical and Biomolecular Engineering