University of illinois Urbana-Champaign


Microscopy Suite Equipment

Listed below are the major microscopes, ancillary equipment, and facilities available to users of the Microscopy Suite. Click the equipment name for more information on each piece of equipment.

Please be aware that the ITG staff cannot respond to questions about particular pieces of equipment or software packages unless those questions are related to research conducted in the ITG laboratories. The ITG does not sell, lease, or distribute equipment or software, save that clearly marked as developed by the ITG.


3D X-ray Computed Tomography

Rigaku CT Lab HX

Now available! The Rigaku CT Lab HX130 is a versatile CT scanner that can cover high-resolution (2.1 µm voxel) to a large field of view (up to 200mm) scans.

Rigaku CTLab GX130

CT Lab GX series, for ultra-high-speed, high-resolution 3D X-ray micro CT. Using the Sample-Stationary Method, these new devices can perform CT scans in 8 seconds at top speed, with a minimum resolution of 4.5 µm.

Rigaku Nano 3DX

Rigaku Nano3DX X-ray Microscope

Zeiss Versa 630

Now available! Zeiss Versa 630

3D X-ray Computed Tomography Prep Equipment

Low Speed Bone Saw

A precision water-cooled rotary saw intended primarily for fine sectioning of SEM samples.

Confocal Imaging

Deep UV Raman Confocal Imaging Microscope

The Deep UV Raman confocal imaging microscope is a home-built spectral imaging system that is optimized for the UV-to-visible spectral range.

Leica SP8 UV/Visible Laser Confocal Microscope

405, 458, 488, 514, 561 & 633 nm laser lines, 28 fps Full Range Resonance Scanning, Tiling, FRAP, FRET.

Multiphoton Fluorescence Confocal Microscope (FCS/FLIM)

ISS Alba FCS instrument with single-photon and multiphoton excitation, plus laser scanning module. Capable of FCS, FLIM and FRET imaging.

Raman Confocal Imaging System

The Raman confocal imaging microscope is a high-resolution research-grade Horiba LabRAM HR 3D-capable Raman spectroscopy imaging system that is optimized for the visible-to-NIR spectral range.

Courtesy Computers

Courtesy 1

Courtesy Computer

Courtesy 3

Courtesy Computer

Electron Microscopy

Environmental Scanning Electron Microscope

ESEM with field-emission electron gun, EDAX energy-dispersive spectroscopy, Peltier-effect heating/cooling stage, 1000µ and 1500µ C heating stages, Everhart-Thornley SED, three GSEDs, backscattered electron detectors, electrical feedthroughs, and more.

Scanning Transmission Electron Microscope (S)TEM

Scanning Transmission Electron Microscope (S)TEM

Electron Microscopy Prep Equipment

Autosamdri 931 Critical Point Dryer

Enables nondestructive drying of biological, biomaterial, and material samples from 100% ethanol.

Desk II Sputter Coater

Turbo-pumped sputter coater with rotating/tilting stage, film thickness monitor; various targets, including Au, Au/Pd, Pt, Al, Ti.

Desk V Sputter Coater

The Desk V Sample Preparation system, equipped for both evaporation and sputtering

Diamond Knife

Diamond Knife (use with UCT if available)

Dual Source Metal Evaporator

Used for high vacuum coating of carbon and other materials as an adjunct to TEM, SEM, X-ray microanalysis, and other research methodologies.

Glow Discharge System

Glow discharge is a mild argon-plasma etch of the surface of carbon-stabilized Formvar-coated TEM grids that removes atmospheric contaminants on TEM grids, rendering them hydrophilic for several days.

High Pressure Freezing

High Pressure Freezing

Oxygen Plasma Asher

Oxygen Plasma Asher

RMC Powertome

For the preparation of thin sections for electron microscopy


Multi-illumination pyramid and knife edge, dual automatic advance system, control unit with cutting speed control, memory for five speed combination settings. Capable of ultrathin sectioning from 50 nm to maximum 5 micrometers.

Light Microscopy/Spectroscopy

Deben Tensile/Compression Stage

Deben Tensile/Compression Stage

Fluorescence Light Microscope

Fluorescence, phase contrast, high NA DIC. Software facilitated image collection.

Inspection Light Microscope

Zeiss AxioScope A1 capable of bright-field, dark-field and DIC microscopy imaging.

Linkam Heating and Cooling Stage

Linkam Heating and Cooling Stage

Micro-Spectroscopy Workstation

Inverted microscope for visible to near-infrared (NIR) spectroscopy (300-1700 nm)

Stereology Workstation

Trace, plot, and analyze structures and cell distribution. System includes all modern stereological probes, Zeiss AxioImager A1 light microscope, Optronics MicroFire Progressive Scan, motorized stage, stereological analysis tools.

Widefield FRET & TIRF Microscope

The Zeiss Axiovert 200M is equipped with a high sensitivity cooled EMCCD camera. The system is capable of fluorescence resonance energy transfer (FRET) microscopy for a number of well-known FRET pairs, such as ECFP-YPet.

Zeiss SteREO Discovery V20 Microscope

Zeiss Stereo Zoom Discovery V.20 Light Microscope with AxioCam 820 and Phantom high speed cameras.

Light Scattering Particle-Sizing Systems

AccuSizer FX Particle Sizer

Focused extinction system for the determination of complex multimodal particle size distributions between 0.7 and 20 microns.

Anton Paar Litesizer Particle-Sizing System

The Litesizerâ„¢ 500 is an instrument for characterizing nano- and microparticles in dispersions and solutions.

NanoSight NS300

The NS300 allows rapid, automated analysis of the size distribution and concentration of all types of nanoparticles from 10nm to 2000nm in diameter, depending on the instrument configuration and sample type.

NICOMP 380 ZLS Particle Sizer

Dynamic light scattering instrument for determining the particle size distribution of particles in a liquid.

Other Preparation Equipment

Fiber/Micropipette Puller

Laser controlled instrument for pulling glass fibers to very fine tips; used primarily for NSOM.

Scanned Probe Microscopy and Profilometry

Atomic Force Microscope (MultiMode AFM)

Capable of contact, tapping, phase imaging, and multiple force modes in air or liquid cell; STM head; J-scanner with x,y range of 125 microns and vertical range of 5 microns; A-scanner with x,y range of 1 micron and vertical range of 400 nm.

P-6 Stylus Profiler

The P-6 stylus profiler continues the tradition of best-in-class technology and performance by incorporating many features from KLA-Tencor's automated P-16+ stylus profiler.


Wet Lab - B612

Bench space, fume hood, some chemicals and solvents, dual source metal evaporator, pH meter, dissecting scope, microbalance, glow discharge system, reverse osmosis water purification system, sonicator, sputter coater, critical point dryer, low speed bone saw, osmium plasma coater, and other equipment.