Microscopy Suite Equipment Fees

Fees/rates for use of equipment in the Microscopy Suite determined through analysis by Government Costing, University of Illinois. In effect starting July 1, 2018; subject to change.

Environmental Scanning Electron Microscope


Field-Emission Environmental Scanning Electron Microscope (ESEM-FEG) with Energy-Dispersive Spectroscopy (EDS)

A versatile microscope with 2 nm ultimate resolution. Works well in both Hi-Vac mode (normal SEM) and Wet mode (as an ESEM). In Wet mode, the Peltier stage may be utilized to keep samples at 100% R.H. while they are being imaged.

Sample Images Acquired from the ESEM.


  • Everhart-Thornley secondary electron detector
  • Robinson series 6 scintillator-type backscattered electron detector (BSD), plus solid-state low- and standard voltage BSDs
  • Several different gaseous secondary electron detectors (GSEDs), from the LF (large-field) detector to the 0.5-mm-aperture detector
  • EDAX light-element energy-dispersive spectroscopy (EDS)
  • Peltier-effect heating/cooling stage (20µ C above/below ambient).
  • 1000µ C hot stage

For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary Contacts
Manufacturer FEI Company
Equipment Model FEI Quanta FEG 450 ESEM
Location B606 L
Phone Numbers (217) 333-5493, (217) 265-5071, (217) 265-8164 (Room B606L)


* The fee for use is added to our purchase cost for the specific precious metal (gold, gold-palladium, or platinum) expended during coating. Gold and gold-palladium are charged at $0.30/nm, and platinum is charged at $0.45/nm. The added fee is easy to determine for the dual-metal evaporator, for which total thicknesses are reported in nm. For the sputter coaters, at 65 mTorr and 40 mA, gold coats at 3 nm/10 seconds, gold-palladium coats at 1 nm/10 seconds, and platinum coats at 1 nm/10 seconds. So a standard 70-second coat of gold will cost an additional (21 x 0.30) $6.30, a 70-second coat of gold-palladium will cost (7 x 0.30) $2.10, and a 70-second coat of platinum will cost (7 x 0.45) $3.15.

**The Xradia NanoCT system requires staff setup of the sample before X-ray collection.

***The actual hourly cost for this instrument is $91.31. The Beckman Institute subsidizes the TEM at a rate of $41.31 per hour for Internal university users. Enterprise Works users are charged the full $91.31 per hour.