Microscopy Suite Equipment Fees

Fees/rates for use of equipment in the Microscopy Suite determined through analysis by Government Costing, University of Illinois. In effect starting July 1, 2018; subject to change.

Inspection Light Microscope


The Zeiss AxioScope A1 is configured to perform reflected light microscopy as well as reflected light differential-interference contrast (DIC) and reflected light dark field microscopy. Images may be acquired using a Zeiss AxioCam MRc color CCD camera. The microscope is used for individual process step inspection of MEMs devices such as microstamps or microfluidic devices, alignment of either multi layer photoresist or multiple polymer layer bonding, also final inspection and evaluation of devices.The Linkam heating/freezing microscope stage THMS600 that comes with the Raman confocal microscope can also be used on this microscope. 


  • High resolution color CCD
  • Reflected Bright Field
  • Reflected Dark Field
  • Reflected Polarized Light
  • Transmitted Bright Field
  • Zeiss AxioVision LE Software

For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary Contacts
Manufacturer Carl Zeiss, Inc.
Equipment Model AxioScope A1
Location B606 I
Phone Numbers (217) 333-4387, (217) 265-5071


* The fee for use is added to our purchase cost for the specific precious metal (gold, gold-palladium, or platinum) expended during coating. Gold and gold-palladium are charged at $0.30/nm, and platinum is charged at $0.45/nm. The added fee is easy to determine for the dual-metal evaporator, for which total thicknesses are reported in nm. For the sputter coaters, at 65 mTorr and 40 mA, gold coats at 3 nm/10 seconds, gold-palladium coats at 1 nm/10 seconds, and platinum coats at 1 nm/10 seconds. So a standard 70-second coat of gold will cost an additional (21 x 0.30) $6.30, a 70-second coat of gold-palladium will cost (7 x 0.30) $2.10, and a 70-second coat of platinum will cost (7 x 0.45) $3.15.

**The Xradia NanoCT system requires staff setup of the sample before X-ray collection.

***The actual hourly cost for this instrument is $91.31. The Beckman Institute subsidizes the TEM at a rate of $41.31 per hour for Internal university users. Enterprise Works users are charged the full $91.31 per hour.