Fees
Microscopy Suite Equipment Fees
Fees/rates for use of equipment in the Microscopy Suite determined through analysis by Government Costing, University of Illinois. In effect starting August 1, 2021; subject to change.
P-6 Stylus Profiler
The P-6 stylus profiler continues the tradition of best-in-class technology and performance by incorporating many features from KLA-Tencor's automated P-16+ stylus profiler:
-- Low noise floor improves measurement sensitivity to characterize small topography
-- Less than 6A step height repeatability ensures stringent process control
-- 150mm X-Y sample stage enables single measurement to cover full substrate
-- 2D stress measurement and analysis minimizes defects and improves yield
-- Powerful yet easy to use analysis software offers flexibility for advanced applications
For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.
| Primary Contacts | |
|---|---|
| Secondary Contacts | |
| Manufacturer | KLA-Tencor |
| Equipment Model | P-6 |
| Location | B606 F |
| Phone Numbers | (217) 265-5071 |
Notes:
* The fee for use is added to our purchase cost for the specific precious metal (gold, gold-palladium, or platinum) expended during coating. Gold and gold-palladium are charged at $0.30/nm, and platinum is charged at $0.45/nm. The added fee is easy to determine for the dual-metal evaporator, for which total thicknesses are reported in nm. For the sputter coaters, at 65 mTorr and 40 mA, gold coats at 3 nm/10 seconds, gold-palladium coats at 1 nm/10 seconds, and platinum coats at 1 nm/10 seconds. So a standard 70-second coat of gold will cost an additional (21 x 0.30) $6.30, a 70-second coat of gold-palladium will cost (7 x 0.30) $2.10, and a 70-second coat of platinum will cost (7 x 0.45) $3.15.