Microscopy Suite Equipment Fees
Fees/rates for use of equipment in the Microscopy Suite determined through analysis by Government Costing, University of Illinois. In effect starting July 1, 2018; subject to change.
P-6 Stylus Profiler
The P-6 stylus profiler continues the tradition of best-in-class technology and performance by incorporating many features from KLA-Tencor's automated P-16+ stylus profiler:
-- Low noise floor improves measurement sensitivity to characterize small topography
-- Less than 6A step height repeatability ensures stringent process control
-- 150mm X-Y sample stage enables single measurement to cover full substrate
-- 2D stress measurement and analysis minimizes defects and improves yield
-- Powerful yet easy to use analysis software offers flexibility for advanced applications
|Phone Numbers||(217) 265-5071|
* The fee for use is added to our purchase cost for the specific precious metal (gold, gold-palladium, or platinum) expended during coating. Gold and gold-palladium are charged at $0.30/nm, and platinum is charged at $0.45/nm. The added fee is easy to determine for the dual-metal evaporator, for which total thicknesses are reported in nm. For the sputter coaters, at 65 mTorr and 40 mA, gold coats at 3 nm/10 seconds, gold-palladium coats at 1 nm/10 seconds, and platinum coats at 1 nm/10 seconds. So a standard 70-second coat of gold will cost an additional (21 x 0.30) $6.30, a 70-second coat of gold-palladium will cost (7 x 0.30) $2.10, and a 70-second coat of platinum will cost (7 x 0.45) $3.15.
**The Xradia NanoCT system requires staff setup of the sample before X-ray collection.
***The actual hourly cost for this instrument is $91.31. The Beckman Institute subsidizes the TEM at a rate of $41.31 per hour for Internal university users. Enterprise Works users are charged the full $91.31 per hour.