Microscopy Suite Equipment Fees

Fees/rates for use of equipment in the Microscopy Suite determined through analysis by Government Costing, University of Illinois. In effect starting July 1, 2018; subject to change.


P-6 Stylus Profiler

profilometer

The P-6 stylus profiler continues the tradition of best-in-class technology and performance by incorporating many features from KLA-Tencor's automated P-16+ stylus profiler:

-- Low noise floor improves measurement sensitivity to characterize small topography

-- Less than 6A step height repeatability ensures stringent process control

-- 150mm X-Y sample stage enables single measurement to cover full substrate

-- 2D stress measurement and analysis minimizes defects and improves yield

-- Powerful yet easy to use analysis software offers flexibility for advanced applications

For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary Contacts
Manufacturer KLA-Tencor
Equipment Model P-6
Location B606 F
Phone Numbers (217) 265-5071

Notes:

* The fee for use is added to our purchase cost for the specific precious metal (gold, gold-palladium, or platinum) expended during coating. Gold and gold-palladium are charged at $0.30/nm, and platinum is charged at $0.45/nm. The added fee is easy to determine for the dual-metal evaporator, for which total thicknesses are reported in nm. For the sputter coaters, at 65 mTorr and 40 mA, gold coats at 3 nm/10 seconds, gold-palladium coats at 1 nm/10 seconds, and platinum coats at 1 nm/10 seconds. So a standard 70-second coat of gold will cost an additional (21 x 0.30) $6.30, a 70-second coat of gold-palladium will cost (7 x 0.30) $2.10, and a 70-second coat of platinum will cost (7 x 0.45) $3.15.

**The Xradia NanoCT system requires staff setup of the sample before X-ray collection.

***The actual hourly cost for this instrument is $91.31. The Beckman Institute subsidizes the TEM at a rate of $41.31 per hour for Internal university users. Enterprise Works users are charged the full $91.31 per hour.