Fees
Microscopy Suite Equipment Fees
Fees/rates for use of equipment in the Microscopy Suite determined through analysis by Government Costing, University of Illinois. In effect starting August 1, 2021; subject to change.
Oxygen Plasma Asher
The Plasmod now comes with a 250 watt, 13.56 MHz, solid state generator, making the Plasmod capable of delivering the highest power/plasma density available. Also available is a process control module that produces accurate and repeatable runs, as well as providing a one button semi-automatic system.
For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.
Primary Contacts | |
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Secondary Contacts |
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Manufacturer | March |
Equipment Model | Plasmod |
Location | B612, Wet Lab |
Phone Numbers | (217) 265-5071 |
Notes:
* The fee for use is added to our purchase cost for the specific precious metal (gold, gold-palladium, or platinum) expended during coating. Gold and gold-palladium are charged at $0.30/nm, and platinum is charged at $0.45/nm. The added fee is easy to determine for the dual-metal evaporator, for which total thicknesses are reported in nm. For the sputter coaters, at 65 mTorr and 40 mA, gold coats at 3 nm/10 seconds, gold-palladium coats at 1 nm/10 seconds, and platinum coats at 1 nm/10 seconds. So a standard 70-second coat of gold will cost an additional (21 x 0.30) $6.30, a 70-second coat of gold-palladium will cost (7 x 0.30) $2.10, and a 70-second coat of platinum will cost (7 x 0.45) $3.15.