Microscopy Suite Equipment Fees

Fees/rates for use of equipment in the Microscopy Suite determined through analysis by Government Costing, University of Illinois. In effect starting July 1, 2018; subject to change.

Oxygen Plasma Asher


The Plasmod now comes with a 250 watt, 13.56 MHz, solid state generator, making the Plasmod capable of delivering the highest power/plasma density available. Also available is a process control module that produces accurate and repeatable runs, as well as providing a one button semi-automatic system.


For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary Contacts
Manufacturer March
Equipment Model Plasmod
Location B612, Wet Lab
Phone Numbers (217) 265-5071


* The fee for use is added to our purchase cost for the specific precious metal (gold, gold-palladium, or platinum) expended during coating. Gold and gold-palladium are charged at $0.30/nm, and platinum is charged at $0.45/nm. The added fee is easy to determine for the dual-metal evaporator, for which total thicknesses are reported in nm. For the sputter coaters, at 65 mTorr and 40 mA, gold coats at 3 nm/10 seconds, gold-palladium coats at 1 nm/10 seconds, and platinum coats at 1 nm/10 seconds. So a standard 70-second coat of gold will cost an additional (21 x 0.30) $6.30, a 70-second coat of gold-palladium will cost (7 x 0.30) $2.10, and a 70-second coat of platinum will cost (7 x 0.45) $3.15.

**The Xradia NanoCT system requires staff setup of the sample before X-ray collection.

***The actual hourly cost for this instrument is $91.31. The Beckman Institute subsidizes the TEM at a rate of $41.31 per hour for Internal university users. Enterprise Works users are charged the full $91.31 per hour.