Microscopy Suite Equipment Fees

Fees/rates for use of equipment in the Microscopy Suite determined through analysis by Government Costing, University of Illinois. In effect starting July 1, 2018; subject to change.

Rigaku Nano 3DX


The Rigaku Nano3DX is a high-resolution X-ray computed tomography instrument that utilizes a parallel beam and permits non-destructive 3D imaging. Its copper/molybdenum dual-metal target can be switched easily between 8- and 20-kV operation. Three separate lenses provide fields-of-view of 0.9 x 0.6, 3.5 x 2.6, and 14.2 x 10.6 mm. The X-ray detector, a Peltier-cooled CCD camera, delivers up to 3200 x 2400 pixels. The sample stage provides horizontal travel of ±1.7 mm, vertical travel of 12 mm, and 360-degree rotation.

Rigaku nano3DX is a true X-ray microscope (XRM) with the ability to deliver 3D computed tomography (CT) images of relatively large samples at high resolution. This is accomplished by using a high powered rotating anode X-ray source and a high-resolution CCD detector. The rotating anode provides for fast data acquisition and the ability to switch anode materials easily to optimize contrast for specific sample types.


- Ultra-wide field of view, 25X larger volume than comparable systems
- 3 X-ray wavelengths (Cr, Cu and Mo Ka) to optimize imaging for different sample matrices
- Parallel beam geometry for high contrast and rapid data collection
- Auto 5-axis (XYZ and rotation) stage and on-axis imaging system
- High resolution three dimensional (3D) images
- High power rotating anode X-ray source
- High contrast for low-Z materials
- High-resolution CCD imager

For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary Contacts
Secondary Contacts
Manufacturer Rigaku
Equipment Model Rigaku Nano 3Dx
Location B604
Phone Numbers 265-0875, 265-5071


* The fee for use is added to our purchase cost for the specific precious metal (gold, gold-palladium, or platinum) expended during coating. Gold and gold-palladium are charged at $0.30/nm, and platinum is charged at $0.45/nm. The added fee is easy to determine for the dual-metal evaporator, for which total thicknesses are reported in nm. For the sputter coaters, at 65 mTorr and 40 mA, gold coats at 3 nm/10 seconds, gold-palladium coats at 1 nm/10 seconds, and platinum coats at 1 nm/10 seconds. So a standard 70-second coat of gold will cost an additional (21 x 0.30) $6.30, a 70-second coat of gold-palladium will cost (7 x 0.30) $2.10, and a 70-second coat of platinum will cost (7 x 0.45) $3.15.

**The Xradia NanoCT system requires staff setup of the sample before X-ray collection.

***The actual hourly cost for this instrument is $91.31. The Beckman Institute subsidizes the TEM at a rate of $41.31 per hour for Internal university users. Enterprise Works users are charged the full $91.31 per hour.