University of illinois Urbana-Champaign

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AFM of FIB Deposited Pt

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Created 10/22/2002

Focused Ion Beam assisted Pt deposition on Si by varying the dwell time of the beam on individual pixels on a pattern created in Adobe Illustrator


  • Soma Chattopadhyay , Beckman Institute
  • Paul Bohn , Beckman Institute
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