University of illinois Urbana-Champaign

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In Situ Thermo-Mechanical Testing at the Micro- and Nanoscale

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Created 04/19/2011

This silicon carbide MEMS stage, developed in our laboratory, offers for the first time the ability to explore the effects of both size (100 nm to tens of micrometers) and temperature (20 to 1000 C) on the thermo-mechanical properties of materials in situ in SEM and TEM. Experimental control of both sample size and temperature is essential to gaining a fundamental understanding of thermo-mechanical behaviors at the micro- and nanoscale. The temperature, stress, and strain of a micro- or nanomaterial sample are measured and recorded simultaneously using built-in temperature and force sensors while high resolution electron micrographs are collected during in situ uniaxial testing.


  • Wonmo Kang , Saif Laboratory, Department of Mechanical Sc ience and Engineering, University of Illinois
  • Taher Saif , Department of Mechanical Science and Engineering, University of Illinois
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