University of illinois Urbana-Champaign

Image of the Week Gallery

Micrograsses on Silicon Substrate

Download original media

Media Details

Created 9/7/2004

The micrograsses in this ESEM image are over 200 micrometers long and 10 micrometers in diameter; the aspect ratio is about 20. The structures were formed using the DRIE process with a formula developed in our laboratory. The micrograss structure is to be used as a pre-concentrator in our MEMS gas sensor project.

Credits

  • Yanjun (David) Tang , Department of Chemical and Biomolecular Engineering
  • Junghoon Yeom , Department of Chemical and Biomolecular Engineering
Back to all images