Micrograsses on Silicon Substrate

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Created 9/7/2004 5:00:00 AM

The micrograsses in this ESEM image are over 200 micrometers long and 10 micrometers in diameter; the aspect ratio is about 20. The structures were formed using the DRIE process with a formula developed in our laboratory. The micrograss structure is to be used as a pre-concentrator in our MEMS gas sensor project.

Credits

• Yanjun (David) Tang , Department of Chemical and Biomolecular Engineering
• Junghoon Yeom , Department of Chemical and Biomolecular Engineering