University of illinois Urbana-Champaign


Environmental Scanning Electron Microscope


Field-Emission Environmental Scanning Electron Microscope (ESEM-FEG) with Energy-Dispersive Spectroscopy (EDS)

A versatile microscope with 2 nm ultimate resolution. Works well in both Hi-Vac mode (normal SEM) and Wet mode (as an ESEM). In Wet mode, the Peltier stage may be utilized to keep samples at 100% R.H. while they are being imaged.



  • Everhart-Thornley secondary electron detector
  • Robinson series 6 scintillator-type backscattered electron detector (BSD), plus solid-state low- and standard voltage BSDs
  • Several different gaseous secondary electron detectors (GSEDs), from the LF (large-field) detector to the 0.5-mm-aperture detector
  • EDAX light-element energy-dispersive spectroscopy (EDS)
  • Peltier-effect heating/cooling stage (20µ C above/below ambient).
  • 1000µ C hot stage

For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary Contacts
Secondary Contacts
Manufacturer FEI Company
Equipment Model FEI Quanta FEG 450 ESEM
Location B606 L
Phone Numbers (217) 333-5493, (217) 265-5071, (217) 265-8164 (Room B606L)