University of illinois Urbana-Champaign


Inspection Light Microscope

Inspection microscope 2020


The Zeiss AxioScope A1 is configured to perform reflected light microscopy as well as reflected light differential-interference contrast (DIC) and reflected light dark field microscopy. Images may be acquired using a Zeiss AxioCam HRc color CCD camera. The microscope is used for individual process step inspection of MEMs devices such as microstamps or microfluidic devices, alignment of either multi layer photoresist or multiple polymer layer bonding, also final inspection and evaluation of devices. The Linkam heating/freezing microscope stage THMS600 that comes with the Raman confocal microscope can also be used on this microscope. 


  • Zeiss AxioCam HRc camera: high resolution (up to 4164 x 3120 pixels) color CCD
  • Reflected bright-field
  • Reflected dark-field
  • Reflected polarized light
  • Transmitted bright-field
  • Zeiss AxioVision Software

For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary Contacts
Secondary Contacts
Manufacturer Carl Zeiss, Inc.
Equipment Model AxioScope A1
Location B606 E
Phone Numbers (217) 333-4387, (217) 265-5071