University of illinois Urbana-Champaign


P-6 Stylus Profiler


The P-6 stylus profiler continues the tradition of best-in-class technology and performance by incorporating many features from KLA-Tencor's automated P-16+ stylus profiler:

-- Low noise floor improves measurement sensitivity to characterize small topography

-- Less than 6A step height repeatability ensures stringent process control

-- 150mm X-Y sample stage enables single measurement to cover full substrate

-- 2D stress measurement and analysis minimizes defects and improves yield

-- Powerful yet easy to use analysis software offers flexibility for advanced applications

For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary Contacts
Secondary Contacts
Manufacturer KLA-Tencor
Equipment Model P-6
Location B606 F
Phone Numbers (217) 265-5071