Details

The P-6 stylus profiler continues the tradition of best-in-class technology and performance by incorporating many features from KLA-Tencor's automated P-16+ stylus profiler:

-- Low noise floor improves measurement sensitivity to characterize small topography

-- Less than 6A step height repeatability ensures stringent process control

-- 150mm X-Y sample stage enables single measurement to cover full substrate

-- 2D stress measurement and analysis minimizes defects and improves yield

-- Powerful yet easy to use analysis software offers flexibility for advanced applications