University of illinois Urbana-Champaign


Oxygen Plasma Asher


The Plasmod now comes with a 250 watt, 13.56 MHz, solid state generator, making the Plasmod capable of delivering the highest power/plasma density available. Also available is a process control module that produces accurate and repeatable runs, as well as providing a one button semi-automatic system.


For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary Contacts
Secondary Contacts
Manufacturer March
Equipment Model Plasmod
Location B612, Wet Lab
Phone Numbers (217) 265-5071