University of illinois Urbana-Champaign

Details

Desk II Sputter Coater

Denton Desk II TSC turbo-pumped sputter coater, with rotating/tilting specimen holder and film thickness monitor. Standard gold/palladium target, with spare gold and platinum.

Features

  • Particle sizing from 1 nm to 5 microns

For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary Contacts
Secondary Contacts
Manufacturer Denton Vacuum, Inc.
Equipment Model Desk-1 TSC
Location B650 G
Phone Numbers (217) 265-5071