Fees
Microscopy Suite Equipment Fees
Fees/rates for use of equipment in the Microscopy Suite determined through analysis by Government Costing, University of Illinois. In effect starting August 1, 2021; subject to change.
Desk II Sputter Coater

Denton Desk II TSC turbo-pumped sputter coater, with rotating/tilting specimen holder and film thickness monitor. Standard gold/palladium target, with spare gold and platinum.
Features
- Particle sizing from 1 nm to 5 microns
For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.
Primary Contacts | |
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Secondary Contacts | |
Manufacturer | Denton Vacuum, Inc. |
Equipment Model | Desk-1 TSC |
Location | B650 G |
Phone Numbers | (217) 265-5071 |
Notes:
* The fee for use is added to our purchase cost for the specific precious metal (gold, gold-palladium, or platinum) expended during coating. Gold and gold-palladium are charged at $0.30/nm, and platinum is charged at $0.45/nm. The added fee is easy to determine for the dual-metal evaporator, for which total thicknesses are reported in nm. For the sputter coaters, at 65 mTorr and 40 mA, gold coats at 3 nm/10 seconds, gold-palladium coats at 1 nm/10 seconds, and platinum coats at 1 nm/10 seconds. So a standard 70-second coat of gold will cost an additional (21 x 0.30) $6.30, a 70-second coat of gold-palladium will cost (7 x 0.30) $2.10, and a 70-second coat of platinum will cost (7 x 0.45) $3.15.