University of illinois Urbana-Champaign

Fees

Microscopy Suite Equipment Fees

Fees/rates for use of equipment in the Microscopy Suite determined through analysis by Government Costing, University of Illinois. In effect starting August 1, 2021; subject to change.


Desk II Sputter Coater

Denton Desk II TSC turbo-pumped sputter coater, with rotating/tilting specimen holder and film thickness monitor. Standard gold/palladium target, with spare gold and platinum.

Features

  • Particle sizing from 1 nm to 5 microns

For additional information about this piece of equipment, see the Calendars, Contacts, and Fees pages.

Primary Contacts
Secondary Contacts
Manufacturer Denton Vacuum, Inc.
Equipment Model Desk-1 TSC
Location B650 G
Phone Numbers (217) 265-5071

Notes:

* The fee for use is added to our purchase cost for the specific precious metal (gold, gold-palladium, or platinum) expended during coating. Gold and gold-palladium are charged at $0.30/nm, and platinum is charged at $0.45/nm. The added fee is easy to determine for the dual-metal evaporator, for which total thicknesses are reported in nm. For the sputter coaters, at 65 mTorr and 40 mA, gold coats at 3 nm/10 seconds, gold-palladium coats at 1 nm/10 seconds, and platinum coats at 1 nm/10 seconds. So a standard 70-second coat of gold will cost an additional (21 x 0.30) $6.30, a 70-second coat of gold-palladium will cost (7 x 0.30) $2.10, and a 70-second coat of platinum will cost (7 x 0.45) $3.15.